Decoster, StefanStefanDecosterKundu, SouvikSouvikKunduLazzarino, FredericFredericLazzarinoLariviere, StephaneStephaneLariviereO'Toole, MartinMartinO'TooleMurdoch, GayleGayleMurdochvan der Veen, MarleenMarleenvan der VeenHeylen, NancyNancyHeylenLe, Quoc ToanQuoc ToanLe2022-12-152022-09-082022-10-102022-12-152022978-1-5106-4987-30277-786XWOS:000844514700003https://imec-publications.be/handle/20.500.12860/40370Patterning of Ru metal lines at 18 nm pitchProceedings paper10.1117/12.2614267978-1-5106-4988-0WOS:000844514700003