Vt extraction methodologies influence process induced Vt variability: Does this fact still hold for advanced technology nodes?

Bhoir, MandarMandarBhoirChiarella, ThomasThomasChiarellaMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchiMohapatra, NiharNiharMohapatra2021-10-282021-10-2820200018-9383https://imec-publications.be/handle/20.500.12860/34743Vt extraction methodologies influence process induced Vt variability: Does this fact still hold for advanced technology nodes?Journal articlehttps://ieeexplore.ieee.org/document/9216596