New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry

Kayser, SvenSvenKayserPirkl, AlexanderAlexanderPirklZakel, JuliaJuliaZakelFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinato2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35364New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometryOral presentation