Gate dielectrics for high performance and low power CMOS SoC applications

Cubaynes, FlorenceFlorenceCubaynesDachs, CharlesCharlesDachsDetcheverry, CelineCelineDetcheverryZegers, A.A.ZegersVenezia, VincentVincentVeneziaSchmitz, JurriaanJurriaanSchmitzStolk, PeterPeterStolkJurczak, GosiaGosiaJurczakHenson, KirklenKirklenHensonDegraeve, RobinRobinDegraeveRothschild, AudeAudeRothschildConard, ThierryThierryConardPétry, JasmineJasminePétryDa Rold, MartinaMartinaDa RoldSchaekers, MarcMarcSchaekersBadenes, GonçalGonçalBadenesDate, L.L.DatePique, D.D.PiqueAl-Shareef, H.H.Al-ShareefMurto, R.R.Murto2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6161Gate dielectrics for high performance and low power CMOS SoC applicationsProceedings paper