Quack, NielsNielsQuackTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariEdinger, PierrePierreEdingerJo, GaehunGaehunJoBleiker, Simon J.Simon J.BleikerErrando-Herranz, CarlosCarlosErrando-HerranzGylfason, Kristinn B.Kristinn B.GylfasonNiklaus, FrankFrankNiklausKhan, Muhammad UmarMuhammad UmarKhanVerheyen, PeterPeterVerheyenMallik, Arun KumarArun KumarMallikLee, Jun SuJun SuLeeJezzini, MoisesMoisesJezziniMorrissey, PadraicPadraicMorrisseyAntony, CleitusCleitusAntonyO'Brien, PeterPeterO'BrienBogaerts, WimWimBogaerts2023-07-102023-04-142023-07-1020232055-7434WOS:000956092800002https://imec-publications.be/handle/20.500.12860/41447Journal article10.1038/s41378-023-00498-zWOS:000956092800002PHASE-SHIFTERALUMINUM NITRIDEPLATFORMCOMPACTTECHNOLOGYRESONATORSWITCHESMEDLINE:36949734