Scholze, FrankFrankScholzeSoltwisch, VictorVictorSoltwischUllrich, A.A.UllrichPhilipsen, VickyVickyPhilipsenBurger, SvenSvenBurger2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25877Actinic characterization of EUV photomasks by EUV scatterometryProceedings paper