Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate

Volkos, S.N.S.N.VolkosBernardini, S.S.BernardiniRigopoulos, N.N.RigopoulosEfthymiou, E.S.E.S.EfthymiouHawkins, I.D.I.D.HawkinsHamilton, B.B.HamiltonDobaczewski, L.L.DobaczewskiHall, S.S.HallHurley, P.KP.KHurleyDelabie, AnneliesAnneliesDelabiePeaker, A.RA.RPeaker2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13197Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrateJournal article