Pantisano, LuigiLuigiPantisanoConard, ThierryThierryConardSchram, TomTomSchramDeweerd, WimWimDeweerdDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsRittersma, C.C.RittersmaMarchiori, C.C.MarchioriSousa, M.M.SousaFompeyrine, F.F.FompeyrineLocquet, J.P.J.P.Locquet2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12668Fabrication of MBE high-k MOSFETs in a standard CMOS flowBook chapter