Mody, JayJayModyZschaetzsch, GerdGerdZschaetzschKoelling, SebastianSebastianKoellingDe Keersgieter, AnAnDe KeersgieterEneman, GeertGeertEnemanKambham, Ajay KumarAjay KumarKambhamDrijbooms, ChrisChrisDrijboomsSchulze, AndreasAndreasSchulzeChiarella, ThomasThomasChiarellaHoriguchi, NaotoNaotoHoriguchiHoffmann, ThomasThomasHoffmannEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/194453D-carrier profiling in FinFETs using scanning spreading resistance microscopyProceedings paper