NH2-terminated self-assembled monolayer as copper diffusion barrier: monolayer characterization

Maestre Caro, ArantxaArantxaMaestre CaroTravaly, YoussefYoussefTravalyArmini, SilviaSilviaArmini2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15783NH2-terminated self-assembled monolayer as copper diffusion barrier: monolayer characterizationMeeting abstract