Multi-scale Modeling Approach to Assess and Mitigate Wafer Warpage in 3-D NAND Fabrication

Okudur, Oguzhan OrkutOguzhan OrkutOkudurGonzalez, MarioMarioGonzalezVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2022-05-062022-05-052022-05-062022-05-062021-092380-632XWOS:000784773200029https://imec-publications.be/handle/20.500.12860/39740Multi-scale Modeling Approach to Assess and Mitigate Wafer Warpage in 3-D NAND FabricationProceedings paper10.1109/IITC51362.2021.9537435978-1-7281-7632-1WOS:000784773200029