Eneman, GeertGeertEnemanSimoen, EddyEddySimoenLauwers, AnneAnneLauwersLindsay, RichardRichardLindsayVerheyen, PeterPeterVerheyenDelhougne, RomainRomainDelhougneLoo, RogerRogerLooCaymax, MattyMattyCaymaxMeunier-Beillard, PhilippePhilippeMeunier-BeillardDemuynck, StevenStevenDemuynckDe Meyer, KristinKristinDe MeyerVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8881Analysis of junctions formed in strained Si/SiGe substratesProceedings paper