Impact of stochastic effects on EUV printability limits

De Bisschop, PeterPeterDe BisschopVan de Kerkhove, JeroenJeroenVan de KerkhoveMailfert, JulienJulienMailfertVaglio Pret, AlessandroAlessandroVaglio PretBiafore, JohnJohnBiafore2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23700Impact of stochastic effects on EUV printability limitsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1863968