Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

Kerber, AndreasAndreasKerberCartier, EduardEduardCartierDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselPantisano, LuigiLuigiPantisanoKauerauf, ThomasThomasKaueraufGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6471Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integrationOral presentation