Halder, SandipSandipHalderVos, RitaRitaVosWada, MasayukiMasayukiWadaTsvetanova, DianaDianaTsvetanovaClaes, MartineMartineClaesMertens, PaulPaulMertensRadovanovic, SandaSandaRadovanovicDighe, PrasannaPrasannaDigheAmann, ChristopheChristopheAmannSimpson, GavinGavinSimpsonPolli, MarcoMarcoPolli2021-10-182021-10-1820100021-4922https://imec-publications.be/handle/20.500.12860/17208Evaluation of post ion-implantation resist strip with the background signal of a light scattering toolJournal article