In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films

Meddeb, HosnyHosnyMeddebBearda, TwanTwanBeardaAbdulraheem, YaserYaserAbdulraheemDimassi, WissemWissemDimassiEzzaouia, HatemHatemEzzaouiaGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-232021-10-2320160749-6036https://imec-publications.be/handle/20.500.12860/26982In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0749603616302518