Wormington, MatthewMatthewWormingtonLafford, TamzinTamzinLaffordGodny, StephaneStephaneGodnyRyan, PaulPaulRyanLoo, RogerRogerLooBhouri, NadaNadaBhouriCaymax, MattyMattyCaymax2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13231Asymmetric relaxation of SiGe in patterned Si line structuresProceedings paper