Electrical activity of intragrain defects in polycrystalline silicon layers obtained by aluminium-induced crystallization and epitaxy

Van Gestel, DriesDriesVan GestelRomero, M.J.M.J.RomeroGordon, IvanIvanGordonCarnel, LodewijkLodewijkCarnelD'Haen, JanJanD'HaenBeaucarne, GuyGuyBeaucarneAl-Jassim, M.M.Al-JassimPoortmans, JefJefPoortmans2021-10-162021-10-162007-02https://imec-publications.be/handle/20.500.12860/13056Electrical activity of intragrain defects in polycrystalline silicon layers obtained by aluminium-induced crystallization and epitaxyJournal article