Thickness dependent residual stress in polycrystalline aluminum nitride thin films

Pobedinskas, P.P.PobedinskasMortet, VincentVincentMortetHaenen, KenKenHaenen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16029Thickness dependent residual stress in polycrystalline aluminum nitride thin filmsMeeting abstract