Nm-scale characterization of deep submicron devices using scanning probes

Vandervorst, WilfriedWilfriedVandervorstDuhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenXu, MingweiMingweiXuClarysse, TrudoTrudoClarysse2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5781Nm-scale characterization of deep submicron devices using scanning probesOral presentation