Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process

Ruzyllo, JerzyJerzyRuzylloRöhr, ErikaErikaRöhrBaeyens, MartienMartienBaeyensConard, ThierryThierryConardMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2921Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition processOral presentation