Eyben, PierrePierreEybenClemente, FrancescaFrancescaClementeVanstreels, KrisKrisVanstreelsPourtois, GeoffreyGeoffreyPourtoisSankaran, KiroubanandKiroubanandSankaranClarysse, TrudoTrudoClarysseMody, JayJayModyDuriau, EdouardEdouardDuriauHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstMylvaganam, KausalaKausalaMylvaganamZhang, LiangchiLiangchiZhang2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17091Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on siliconJournal article