Interconnect reliability – A study of the effect of dimensional and porosity scaling

Croes, KristofKristofCroesWilson, ChrisChrisWilsonLofrano, MelinaMelinaLofranoBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18754Interconnect reliability – A study of the effect of dimensional and porosity scalingJournal article