Defect aspects of Ge-on-Si materials and devices

Claeys, CorCorClaeysEneman, GeertGeertEnemanWang, GangGangWangSouriau, LaurentLaurentSouriauLoo, RogerRogerLooSimoen, EddyEddySimoen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15108Defect aspects of Ge-on-Si materials and devicesProceedings paper