Kalicinski, StanislawStanislawKalicinskiSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanDe Moor, PietPietDe MoorDe Vries, Atze-CeesAtze-CeesDe VriesVan Hoof, ChrisChrisVan HoofWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/10674A dedicated loading instrument for characterization and testing of MEMSProceedings paper