Impact of CMOS processing steps on the drain current kink of NMOSFETS at liquid helium temperature

Simoen, EddyEddySimoenClaeys, C.C.Claeys2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5656Impact of CMOS processing steps on the drain current kink of NMOSFETS at liquid helium temperatureJournal article