Nanoscale simulation of self heating and thermal crosstalk in 3D finFET architectures

Vermeersch, BjornBjornVermeerschBury, ErikErikBuryCroes, KristofKristofCroesOprins, HermanHermanOprinsKamrani, HamedHamedKamraniPourtois, GeoffreyGeoffreyPourtois2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34371Nanoscale simulation of self heating and thermal crosstalk in 3D finFET architecturesMeeting abstracthttps://mrsspring2019.zerista.com/event/member/560810