Plasma nitrided silicon rich oxide as an extension to ultra-thin nitrided oxide gate dielectrics

Cubaynes, FlorenceFlorenceCubaynesVenezia, V.V.VeneziaEveraert, Jean-LucJean-LucEveraertShi, XiaopingXiaopingShiRothschild, AudeAudeRothschildSchaekers, MarcMarcSchaekers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8740Plasma nitrided silicon rich oxide as an extension to ultra-thin nitrided oxide gate dielectricsProceedings paper