Low-k OSG damage and etching by F atoms at lowered temperatures

Zyryanov, S.S.ZyryanovKurchikov, D.D.KurchikovLopaev, D.D.LopaevMankelevich, Y.Y.MankelevichPalov, A.A.PalovRakhimova, T.T.RakhimovaVoronina, E.E.VoroninaNovikova, N.N.NovikovaBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26256Low-k OSG damage and etching by F atoms at lowered temperaturesOral presentation