ToF-SIMS - SPM combined analysis for real 3D depth profiling of heterogeneous microelectronic structures

Franquet, AlexisAlexisFranquetBarnes, Jean-PaulJean-PaulBarnesSpampinato, ValentinaValentinaSpampinatoMoreno Villavicencio, M.A.M.A.Moreno VillavicencioChevalier, N.N.ChevalierConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28353ToF-SIMS - SPM combined analysis for real 3D depth profiling of heterogeneous microelectronic structuresMeeting abstracthttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf