Tierno, DavideDavideTiernoCroes, KristofKristofCroesAjaykumar, ArjunArjunAjaykumarRamesh, SivaSivaRameshVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2022-06-092021-11-022022-05-102022-06-0920211541-7026WOS:000672563100044https://imec-publications.be/handle/20.500.12860/37681Reliability of Mo as Word Line Metal in 3D NANDProceedings paper10.1109/IRPS46558.2021.9405132978-1-7281-6893-7WOS:000672563100044