Computation of capacitance matrix for integrated circuit interconnects using semi-analytic Green's function method

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4961Computation of capacitance matrix for integrated circuit interconnects using semi-analytic Green's function methodJournal article