Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution

Shimizu, YasuoYasuoShimizuKawamura, Y.Y.KawamuraUematsu, M.M.UematsuItoh, Kohei M.Kohei M.ItohTomita, MitsuhiroMitsuhiroTomitaSasaki, MikioMikioSasakiUchida, HiroshiHiroshiUchidaTakahashi, MamoruMamoruTakahashi2021-10-182021-10-1820090021-8979https://imec-publications.be/handle/20.500.12860/16217Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolutionJournal article