Dewulf, DaanDaanDewulfPeys, NickNickPeysVan Elshocht, SvenSvenVan ElshochtRampelberg, GeertGeertRampelbergDetavernier, G.G.DetavernierDe Gendt, StefanStefanDe GendtHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18842Interfacial reactions of Gd- and Nb-oxide based high-k layers deposited by aqueous chemical solution depositionJournal article