Vici, AndreaAndreaViciDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselFranco, JacopoJacopoFrancoKaczer, BenBenKaczerDe Wolf, IngridIngridDe Wolf2024-03-282023-07-152024-03-2820231541-7026WOS:001007431500090https://imec-publications.be/handle/20.500.12860/42155Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrationsProceedings paper10.1109/IRPS48203.2023.10117955978-1-6654-5672-2WOS:001007431500090TRAP GENERATIONBREAKDOWNSTRESSSILC