A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

Wu, QianQianWuBayerl, A.A.BayerlPorti, MarcMarcPortiMartin-Martinez, JavierJavierMartin-MartinezLanza, MarioMarioLanzaRodiguez, RosannaRosannaRodiguezVelayudhan, VikasVikasVelayudhanNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerichGonzalez, Mireia BMireia BGonzalezSimoen, EddyEddySimoen2021-10-222021-10-2220140018-9383https://imec-publications.be/handle/20.500.12860/24837A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6880443