Direct visualization and in-depth physical study of metal filament formation in percolated high-k dielectrics

Li, X.X.LiPey, K.L.K.L.PeyBosman, M.M.BosmanLiu, W.H.W.H.LiuKauerauf, ThomasThomasKauerauf2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/17487Direct visualization and in-depth physical study of metal filament formation in percolated high-k dielectricsJournal article