Smirnov, EvgenyEvgenySmirnovVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckCiofi, IvanIvanCiofiShamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovPhillips, MarkMarkPhillips2021-10-192021-10-1920110021-4922https://imec-publications.be/handle/20.500.12860/19808Evaluation of a new advanced low-k materialJournal article