The effect of plasma damage and different annealing ambients on the generation of latent interface states

Creusen, MartinMartinCreusenLee, Hean-ChealHean-ChealLeeVanhaelemeersch, SergeSergeVanhaelemeerschGroeseneken, GuidoGuidoGroeseneken2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2465The effect of plasma damage and different annealing ambients on the generation of latent interface statesProceedings paper