Roelkens, G.G.RoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9515Heterogeneous integration of III-V membrane devices and ultracompact SOI waveguidesProceedings paper