Machine Learning-based SEM Images Contour Extraction Data Augmentation

Zhang, HongmingHongmingZhangMa, YuanshengYuanshengMaFang, HawrenHawrenFangZeng, XuefengXuefengZengHong, LeLeHongSun, YuyangYuyangSunMeng, RenyangRenyangMengGillijns, WernerWernerGillijnsWu, WeiWeiWu2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300087https://imec-publications.be/handle/20.500.12860/45944Machine Learning-based SEM Images Contour Extraction Data AugmentationProceedings paper10.1117/12.3051484978-1-5106-8639-7WOS:001514426300087