Pérez-Rodríguez, A.A.Pérez-RodríguezRoca, ElisendaElisendaRocaJawhari, T.T.JawhariMorante, J. R.J. R.MoranteSchreutelkamp, RobRobSchreutelkamp2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/294Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurementsJournal article