Delabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsVan Elshocht, SvenSvenVan ElshochtJung, Sung-HoonSung-HoonJungRaisanen, PetriPetriRaisanenGivens, MichaelMichaelGivensShero, EricEricSheroPeeters, JozefJozefPeetersMachkaoutsan, VladimirVladimirMachkaoutsanMaes, JanJanMaes2021-10-192021-10-192011-030013-4651https://imec-publications.be/handle/20.500.12860/18825Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide speciesJournal article