Cost model for silicon wafer equivqlent approach: European project ThinSi

Vazquez, M.A.M.A.VazquezUlyashin, A.A.UlyashinReber, S.S.ReberHampel, J.J.HampelGordon, IvanIvanGordonVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenVardavoulias, M.M.VardavouliasGlockner, R.R.GlocknerEmamifard, B.B.EmamifardProudfoot, G.G.ProudfootBailey, L.R.L.R.BaileyBeekmann, K.K.BeekmannCooke, MMCookeChoy, K.L..K.L..ChoyWells, K.K.Wells2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21758Cost model for silicon wafer equivqlent approach: European project ThinSiProceedings paper