On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etch

Leunissen, PeterPeterLeunissenLorusso, GianGianLorussoDiBiase, TonyTonyDiBiaseYang, H.H.YangAzordegan, A.A.Azordegan2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10772On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etchJournal article