Resist reflow methodology development to investigate interfacial interactions

Severi, JorenJorenSeveriChan, CinziaCinziaChanDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2023-04-062023-03-012023-04-0620221932-5150WOS:000924949300028https://imec-publications.be/handle/20.500.12860/41207Resist reflow methodology development to investigate interfacial interactionsJournal article10.1117/1.JMM.21.4.044602WOS:000924949300028SURFACEFILMS