Impact of different defects on the kinetics of Negative Bias Temperature Instability of Hafnium stacks

Zhang, J.F.J.F.ZhangZhao, C.Z.C.Z.ZhaoChang, M.H.M.H.ChangZahid, MohammedMohammedZahidPeaker, A.R.A.R.PeakerHall, SSHallGroeseneken, GuidoGuidoGroesenekenPantisano, LuigiLuigiPantisanoDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-172021-10-1720080003-6951https://imec-publications.be/handle/20.500.12860/14831Impact of different defects on the kinetics of Negative Bias Temperature Instability of Hafnium stacksJournal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000092000001013501000001&idtype=cvips&prog=search