Van Elshocht, SvenSvenVan ElshochtBrijs, BertBertBrijsCaymax, MattyMattyCaymaxConard, ThierryThierryConardChiarella, ThomasThomasChiarellaDe Gendt, StefanStefanDe GendtDe Jaeger, BriceBriceDe JaegerKubicek, StefanStefanKubicekMeuris, MarcMarcMeurisOnsia, BartBartOnsiaRichard, OlivierOlivierRichardTeerlinck, IvoIvoTeerlinckVan Steenbergen, JanJanVan SteenbergenZhao, ChaoChaoZhaoHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9742Deposition of HfO2 on germanium and the impact of surface pretreatmentsJournal article