Electrical defect issues of hetero-epitaxy for advanced nanometric CMOS technologies

Claeys, CorCorClaeysBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooSimoen, EddyEddySimoen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15107Electrical defect issues of hetero-epitaxy for advanced nanometric CMOS technologiesProceedings paper