A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD

Abdulraheem, YaserYaserAbdulraheemGordon, IvanIvanGordonBearda, TwanTwanBeardaPoortmans, JefJefPoortmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20250A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVDOral presentation